張璽

張璽 特聘研究員

2006年，上海交通大學，機械工程及自動化，工程學士學位

2006年，上海交通大學，工商管理，管理學第二學士學位

2009年，美國南佛羅里達大學，工業管理與系統工程，博士學位

複雜系統的過程建模和質量監控、生產系統中的數據挖掘、診斷以及其在工業中應用

美國國家科學基金NSF CMMI Graduate Student Travel Grant, 2009

Zhang, X., Huang, Q., 2010, “Analysis of Interaction Structure among Multiple Functional Process Variables for Process Monitoring in Semiconductor Manufacturing”, IEEE Transactions on Semiconductor Manufacturing, vol. 23 (2), pp.263-272.

Zhang, X., Wang, H., Huang, Q., Kumar, A., and Zhai, J., 2009, “Statistical and Experimental Analysis of Correlated Time-varying Process Variables for Condition Diagnosis in Chemical-Mechanical Planarization”, IEEE Transactions on Semiconductor Manufacturing, vol. 22 (3), pp.512-521.

Wang, H., Zhang, X., Kumar, A., Huang, Q., 2009, “Nonlinear Dynamics Modeling of Correlated Functional Process Variables for Condition Monitoring in Chemical-Mechanical Planarization”, IEEE Transactions on Semiconductor Manufacturing, vol.22, pp. 188-195.